Physik Instrumente unveil A-110 PIglide Linear Stage for nanometer-precision motion
SHREWSBURY, Mass., Sept. 1, 2026, Physik Instrumente (PI) has unveiled the A-110 PIglide Linear Stage, a cutting-edge air-bearing stage designed for nanometer-precision motion in compact, noncontact, and lubrication-free applications. This innovative technology is particularly suited for optics, semiconductor, and metrology industries where precision and cleanliness are paramount.
Unlike conventional stages that rely on mechanical bearings, the A-110 employs air bearings, which eliminate mechanical contact between moving surfaces. This noncontact approach ensures smooth, wear-free motion and long-term geometric accuracy, free from the particulate generation and performance drift typical of mechanical bearing stages. The stage’s magnetically preloaded air bearings support high stiffness even under offset or asymmetric loads, a significant advantage over contact-bearing stages, which often compromise on friction and wear.
The A-110's noncontact bearing design also ensures excellent straightness, flatness, pitch, and yaw characteristics, crucial for applications requiring precise angular and lateral positioning. Its ironless brushless linear motor delivers direct-drive actuation without the cogging forces found in traditional motors. Combined with high-resolution encoder feedback and advanced motion control algorithms, the A-110 can achieve velocities up to 1 m/s and accelerations up to 20 m/s², with calibrated positioning accuracy down to ±0.5 µm and encoder resolutions down to 1 nanometer.
Available travel ranges span from 50 mm to 400 mm, making the A-110 suitable for both single-axis and multi-axis configurations. Its clean-room compatibility and lack of mechanical wear mean it minimizes particulate contamination, a critical feature in applications such as wafer inspection, photomask handling, and optical metrology. The A-110 can be used as a standalone linear axis or integrated into multi-axis positioning systems, offering flexibility for a wide range of precision scanning applications.
Key technical features of the A-110 include its magnetic preloading, high stiffness, and compatibility with clean-room environments. The stage’s specifications cater to high-precision requirements, with travel ranges from 50 mm to 400 mm and performance metrics that support a wide variety of industrial applications.
"Precision and reliability are the hallmarks of the A-110," said Dr. Michael Schmitz, Product Manager at PI Americas. "Our customers demand stages that can perform consistently over millions of cycles, and the A-110 delivers precisely that."
Applications for the A-110 PIglide Linear Stage include optical metrology, semiconductor inspection, precision scanning systems, photonics alignment, coordinate measurement, flat-panel display manufacturing, scientific instrumentation, and high-precision automation.